BADALI, Y. Et Al. 2022. Plasma-enhanced atomic layer deposition of amorphous Ga2O3 gate dielectrics. Journal of Physics and Chemistry of Solids , vol.170 .

BADALI, Y., Arslan, E., Ulusoy, T. G., ÖZÇELİK, S., & Özbay, E., (2022). Plasma-enhanced atomic layer deposition of amorphous Ga2O3 gate dielectrics. Journal of Physics and Chemistry of Solids , vol.170.

BADALI, YOSEF Et Al. "Plasma-enhanced atomic layer deposition of amorphous Ga2O3 gate dielectrics," Journal of Physics and Chemistry of Solids , vol.170, 2022

BADALI, YOSEF Et Al. "Plasma-enhanced atomic layer deposition of amorphous Ga2O3 gate dielectrics." Journal of Physics and Chemistry of Solids , vol.170, 2022

BADALI, Y. Et Al. (2022) . "Plasma-enhanced atomic layer deposition of amorphous Ga2O3 gate dielectrics." Journal of Physics and Chemistry of Solids , vol.170.

@article{article, author={YOSEF BADALI Et Al. }, title={Plasma-enhanced atomic layer deposition of amorphous Ga2O3 gate dielectrics}, journal={Journal of Physics and Chemistry of Solids}, year=2022}